ECE442H1

Introduction to Micro- and Nano-Fabrication Technologies

An introduction to the fundamentals of micro- and non-fabrication processes with emphasis on cleanroom practices. The physical principles of optical lithography, electron-beam lithography, alternative nanolithography techniques, and thin film deposition and metrology methods. The physical and chemical processes of wet and dry etching. Cleanroom concepts and safety protocols. Sequential micro-fabrication processes involved in the manufacture of microelectronic and photonic devices. Imaging and characterization of micro- and nano-structures. Examples of practical existing and emerging micro- and nano-devices.Emphasis will be hands-on learning. Students, divided in small groups, will use the tolls and equipment at the Toronto Nanofabrication Cantre (TNFC) and the Open Centre for the Characterization of Advanced Materials (OCCAM). Limited enrollment.